Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
We set up a pulsed beam steering system with a simple feedback control method. The system applies an integration circuit to process a 2 μs short pulsed beam with a repetition rate of 25 Hz, and employs an iteration method to correct the beam with a reasonable feedback gain factor. The beam steering system achieves a performance of 30 μm position accuracy and 30 μrad pointing accuracy, and it can not only compensate the drift of the laser source but also correct the external disturbance. The design can be directly applied as a lithography tool.
Chinese Optics Letters
2015, 13(Suppl): S21401
Author Affiliations
Abstract
We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration and average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.
140.0140 Lasers and laser optics 140.3425 Laser stabilization Chinese Optics Letters
2014, 12(8): 081405
